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19.03.2009 13:00

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Rohm and Haas and AIXTRON Announce Installation of VaporStation™ Central Delivery System

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Rohm and Haas Electronic Materials (NYSE:ROH) and AIXTRON AG announced today that a VaporStation™ central delivery system has been installed and is now operational at the AIXTRON Applications and Demonstration Center.

AIXTRON, a leading manufacturer of metalorganic chemical vapor deposition (MOCVD) equipment, is using the VaporStation central delivery system to deliver trimethylgallium (TMGa) to a CRIUS® and a Planetary MOCVD system. More MOCVD systems are expected to be connected to the VaporStation central delivery system at its new location in Aachen, Germany.

The VaporStation central delivery system, developed by Rohm and Haas, is designed to deliver TMGa and other metalorganic precursors to multiple MOCVD reactors from a central supply source cabinet using a high-purity carrier gas. This delivery technology improves the economy and the safety of the MOCVD process through the reduction of cylinder changes and handling. It enables manufacturers of compound semiconductors, such as LEDs, solar cells and laser diodes, to further reduce production costs. In the case of the LED industry, the VaporStation central delivery system will help manufacturers to more quickly reach cost parity with conventional general lighting production.

"As the market leader for MOCVD equipment, we are constantly looking for ways to improve the technology and reduce running costs for our customers" says Johannes Kaeppeler, vice president of Technology for AIXTRON. "The delivery of TMGa from a central unit reduces the foot print of our systems, and this is an important consideration for our customers using expensive clean room space.

"The performance of the system met with our expectations right from the first run," Kaeppeler continues. "Without a single calibration run, gallium nitride (GaN) films made using the central delivery system could not be distinguished from the films made using the conventional onboard delivery method."

"Providing a simpler, more efficient alternative for customers is a top priority for us, and AIXTRON clearly shares this vision of the future,” said Joe Reiser, general manager for Rohm and Haas Electronic Materials’ Metalorganics business. "Delivery to multiple reactors using large-scale cylinders with 20 kg or more of content eliminates a number of costly inefficiencies, such as calibration runs, cylinder change outs and residual "heels” associated with on board cylinders. Additionally, the VaporStation central delivery system significantly increases reactor up time,” explains Reiser.

The flexibility, control and economy of the VaporStation central delivery system has appealed to Rohm and Haas Electronic Materials customers since its debut in 2004, and recent installations at leading LED and solar cell manufacturers have proven its production worthiness. The system can deliver a stable MO precursor concentration at a precisely controlled flow rate to up to 10 MOCVD reactors from a single 20 kg supply cylinder. The VaporStation delivery system has shown excellent performance and superior economy over the traditional on-board MO source approach in which each MOCVD reactor requires its own cylinder.

About Rohm and Haas Company

Leading the way since 1909, Rohm and Haas is a global pioneer in the creation and development of innovative technologies and solutions for the specialty materials industry. The company’s technologies are found in a wide range of markets including: Building and Construction, Electronics, Food and Retail, Household and Personal Care, Industrial Process, Packaging, Paper, Transportation and Water. Our innovative technologies and solutions help to improve life everyday, around the world. Based in Philadelphia, PA, the company generated annual sales of approximately $8.9 billion in 2007. Visit www.rohmhaas.com for more information. imagine the possibilities™

About Rohm and Haas Electronic Materials

Rohm and Haas Electronic Materials develops and delivers innovative material solutions and processes to the electronic and optoelectronic industries. Focused on the circuit board, semiconductor manufacturing, advanced packaging, and flat panel display industries, its products and technologies are integral elements in electronic devices around the world.

About AIXTRON AG

AIXTRON AG is a leading provider of deposition equipment to the semiconductor industry. The Company's technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and optoelectronic applications based on compound, silicon, or organic semiconductor materials and more recently carbon nanostructures. Such components are used in display technology, signal and lighting technology, fiber communication networks, wireless and cell telephony applications, optical and electronic data storage, computer technology as well as a wide range of other high-tech applications. AIXTRON AG’s securities are listed on the Frankfurt Stock Exchange and, in form of American Depositary Shares (ADS), on the Global Market of the NASDAQ Stock Market, and are included in the TecDax index, the Nasdaq Composite Index, the MSCI World Small Cap Index and the Nature Stock Index (NAI). Founded in 1983, the Company is headquartered in Aachen, Germany.

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