Rohm and Haas Electronic Materials (NYSE:ROH)
and AIXTRON AG announced today that a VaporStation™
central delivery system has been installed and is now operational at the
AIXTRON Applications and Demonstration Center.
AIXTRON, a leading manufacturer of metalorganic chemical vapor
deposition (MOCVD) equipment, is using the VaporStation central delivery
system to deliver trimethylgallium
(TMGa) to a CRIUS® and a Planetary MOCVD system. More MOCVD
systems are expected to be connected to the VaporStation central
delivery system at its new location in Aachen, Germany.
The VaporStation central delivery system, developed by Rohm and Haas, is
designed to deliver TMGa and other metalorganic precursors to multiple
MOCVD reactors from a central supply source cabinet using a high-purity
carrier gas. This delivery technology improves the economy and the
safety of the MOCVD process through the reduction of cylinder changes
and handling. It enables manufacturers of compound semiconductors, such
as LEDs, solar cells and laser diodes, to further reduce production
costs. In the case of the LED industry, the VaporStation central
delivery system will help manufacturers to more quickly reach cost
parity with conventional general lighting production.
"As the market leader for MOCVD equipment, we are constantly looking for
ways to improve the technology and reduce running costs for our
customers" says Johannes Kaeppeler, vice president of Technology for
AIXTRON. "The delivery of TMGa from a central unit reduces the foot
print of our systems, and this is an important consideration for our
customers using expensive clean room space.
"The performance of the system met with our expectations right from the
first run," Kaeppeler continues. "Without a single calibration run,
gallium nitride (GaN) films made using the central delivery system could
not be distinguished from the films made using the conventional onboard
delivery method."
"Providing a simpler, more efficient alternative for customers is a top
priority for us, and AIXTRON clearly shares this vision of the future,”
said Joe Reiser, general manager for Rohm and Haas Electronic Materials’
Metalorganics business. "Delivery to multiple reactors using large-scale
cylinders with 20 kg or more of content eliminates a number of costly
inefficiencies, such as calibration runs, cylinder change outs and
residual "heels” associated with on board cylinders. Additionally, the
VaporStation central delivery system significantly increases reactor up
time,” explains Reiser.
The flexibility, control and economy of the VaporStation central
delivery system has appealed to Rohm and Haas Electronic Materials
customers since its debut in 2004, and recent installations at leading
LED and solar cell manufacturers have proven its production worthiness.
The system can deliver a stable MO precursor concentration at a
precisely controlled flow rate to up to 10 MOCVD reactors from a single
20 kg supply cylinder. The VaporStation delivery system has shown
excellent performance and superior economy over the traditional on-board
MO source approach in which each MOCVD reactor requires its own cylinder.
About Rohm and Haas Company
Leading the way since 1909, Rohm and Haas is a global pioneer in the
creation and development of innovative technologies and solutions for
the specialty materials industry.
The company’s technologies are
found in a wide range of markets including: Building and Construction,
Electronics, Food and Retail, Household and Personal Care, Industrial
Process, Packaging, Paper, Transportation and Water. Our innovative
technologies and solutions help to improve life everyday, around the
world. Based in Philadelphia, PA, the company generated annual sales of
approximately $8.9 billion in 2007. Visit www.rohmhaas.com
for more information. imagine the possibilities™
About Rohm and Haas Electronic Materials
Rohm and Haas Electronic Materials develops and delivers innovative
material solutions and processes to the electronic and optoelectronic
industries. Focused on the circuit board, semiconductor manufacturing,
advanced packaging, and flat panel display industries, its products and
technologies are integral elements in electronic devices around the
world.
About AIXTRON AG
AIXTRON AG is a leading provider of deposition equipment to the
semiconductor industry. The Company's technology solutions are used by a
diverse range of customers worldwide to build advanced components for
electronic and optoelectronic applications based on compound, silicon,
or organic semiconductor materials and more recently carbon
nanostructures. Such components are used in display technology, signal
and lighting technology, fiber communication networks, wireless and cell
telephony applications, optical and electronic data storage, computer
technology as well as a wide range of other high-tech applications.
AIXTRON AG’s securities are listed on the Frankfurt Stock Exchange
and, in form of American Depositary Shares (ADS), on the Global Market
of the NASDAQ Stock Market, and are included in the TecDax index, the
Nasdaq Composite Index, the MSCI World Small Cap Index and the Nature
Stock Index (NAI).
Founded in 1983, the Company is headquartered
in Aachen, Germany.